Integrated Assemblies and Methods of Forming Integrated Assemblies

ABSTRACT

Some embodiments include a method of forming an integrated assembly. Semiconductor material is patterned into a configuration which includes a set of first upwardly-projecting structures spaced from one another by first gaps, and a second upwardly-projecting structure spaced from the set by a second gap. The second gap is larger than the first gaps. Conductive material is formed along the first and second upwardly-projecting structures and within the first and second gaps. First and second segments of protective material are formed over regions of the conductive material within the second gap, and then an etch is utilized to pattern the conductive material into first conductive structures within the first gaps and into second conductive structures within the second gap. Some embodiments include integrated assemblies.

TECHNICAL FIELD

Integrated assemblies (e.g., integrated memory). Methods of formingintegrated assemblies.

BACKGROUND

Memory may utilize memory cells which individually comprise an accessdevice (e.g., an access transistor) in combination with a storageelement (e.g., a capacitor, a resistive memory device, a phase changememory device, etc.).

In some applications it is desired to form conductive interconnectswhich pass through a tier of memory architecture. Difficulties areencountered in forming such conductive interconnects while alsomaintaining integrity of structural components of the memoryarchitecture (e.g., while also maintaining integrity of wordlines). Itwould be desirable to develop improved methods for fabricating memoryarchitecture and improved methods of forming conductive interconnectspassing through a tier of the memory architecture.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a diagrammatic top-down view of a region of an exampleintegrated assembly at an example process stage of an example method.FIGS. 1A and 1B are diagrammatic cross-sectional side views along thelines A-A and B-B, respectively, of FIG. 1.

FIGS. 2 and 2A are a diagrammatic top-down view and a diagrammaticcross-sectional side view, respectively, of the region of the exampleintegrated assembly of FIGS. 1 and 1A at an example process stagesubsequent to that of FIGS. 1 and 1A. FIG. 2A is a diagrammaticcross-sectional side view along the line A-A of FIG. 2.

FIGS. 3 and 3A are a diagrammatic top-down view and a diagrammaticcross-sectional side view, respectively, of the region of the exampleintegrated assembly of FIGS. 1 and 1A at an example process stagesubsequent to that of FIGS. 2 and 2A. FIG. 3A is a diagrammaticcross-sectional side view along the line A-A of FIG. 3.

FIGS. 4 and 4A are a diagrammatic top-down view and a diagrammaticcross-sectional side view, respectively, of the region of the exampleintegrated assembly of FIGS. 1 and 1A at an example process stagesubsequent to that of FIGS. 3 and 3A. FIG. 4A is a diagrammaticcross-sectional side view along the line A-A of FIG. 4.

FIGS. 5 and 5A are a diagrammatic top-down view and a diagrammaticcross-sectional side view, respectively, of the region of the exampleintegrated assembly of FIGS. 1 and 1A at an example process stagesubsequent to that of FIGS. 4 and 4A. FIG. 5A is a diagrammaticcross-sectional side view along the line A-A of FIG. 5.

FIGS. 6 and 6A are a diagrammatic top-down view and a diagrammaticcross-sectional side view, respectively, of the region of the exampleintegrated assembly of FIGS. 1 and 1A at an example process stagesubsequent to that of FIGS. 5 and 5A. FIG. 6A is a diagrammaticcross-sectional side view along the line A-A of FIG. 6.

FIGS. 7 and 7A are a diagrammatic top-down view and a diagrammaticcross-sectional side view, respectively, of the region of the exampleintegrated assembly of FIGS. 1 and 1A at an example process stagesubsequent to that of FIGS. 6 and 6A. FIG. 7A is a diagrammaticcross-sectional side view along the line A-A of FIG. 7.

FIGS. 8 and 8A are a diagrammatic top-down view and a diagrammaticcross-sectional side view, respectively, of the region of the exampleintegrated assembly of FIGS. 1 and 1A at an example process stagesubsequent to that of FIGS. 7 and 7A. FIG. 8A is a diagrammaticcross-sectional side view along the line A-A of FIG. 8.

FIG. 8B is a diagrammatic cross-sectional side view along the line B-Bof FIG. 8.

FIG. 9 is a diagrammatic schematic view of a region of an example memoryarray.

DETAILED DESCRIPTION OF THE ILLUSTRATED EMBODIMENTS

Some embodiments include methods of forming integrated assemblies.Protective material (e.g., silicon dioxide, aluminum oxide, hafniumoxide, etc.) may be utilized to protect segments of conductive materialwithin wide gaps during an etch so that such segments remain asconductive lines (e.g., wordlines) in a finished architecture. Someembodiments include integrated assemblies in which conductive lines(e.g., wordlines) in wide gaps have different cross-sectional shapesthan analogous conductive lines within narrow gaps. Example embodimentsare described with reference to FIGS. 1-9.

Referring to FIGS. 1-1B, an integrated assembly 10 includes a series ofconductive lines 12 which extend along a first direction (an illustratedx-axis direction). The lines 12 are illustrated to be straight, but inother embodiments may be curved, wavy, etc.

The conductive lines 12 are spaced from one another by interveningregions 14 which comprise insulative material 16. The insulativematerial 16 may comprise any suitable composition(s); and in someexample embodiments may comprise, consist essentially of, or consist ofsilicon dioxide.

The conductive lines 12 comprise conductive material 18. The conductivematerial 18 may comprise any suitable electrically conductivecomposition(s); such as, for example, one or more of various metals(e.g., titanium, tungsten, cobalt, nickel, platinum, ruthenium, etc.),metal-containing compositions (e.g., metal silicide, metal nitride,metal carbide, etc.), and/or conductively-doped semiconductor materials(e.g., conductively-doped silicon, conductively-doped germanium, etc.).

The conductive lines 12 and the insulative material 16 may be consideredto be comprised by a first tier (level) 20, with such tier beingsupported over a semiconductor base 22 (as shown in FIGS. 1A and 1B).The semiconductor base 22 may comprise semiconductor material; and may,for example, comprise, consist essentially of, or consist ofmonocrystalline silicon. The base 22 may be referred to as asemiconductor substrate. The term “semiconductor substrate” means anyconstruction comprising semiconductive material, including, but notlimited to, bulk semiconductive materials such as a semiconductive wafer(either alone or in assemblies comprising other materials), andsemiconductive material layers (either alone or in assemblies comprisingother materials). The term “substrate” refers to any supportingstructure, including, but not limited to, the semiconductor substratesdescribed above. In some applications, the base 22 may correspond to asemiconductor substrate containing one or more materials associated withintegrated circuit fabrication. Such materials may include, for example,one or more of refractory metal materials, barrier materials, diffusionmaterials, insulator materials, etc.

The tier 20 is shown to be vertically offset relative to the base 22,and specifically is shown to be offset from the base 22 along anillustrated z-axis direction.

A gap is provided between the tier 20 and the base 22 to indicate thatother materials and structures may be provided between the tier 20 andthe base 22. In some embodiments, circuitry (e.g., logic circuitry, suchas, for example, CMOS) may be provided along the base 22. One or moreconductive interconnects may eventually be formed to extend through thetier 20 to the circuitry associated with the base 22.

The conductive lines 12 may be referred to as first conductive lines,and may be considered to be configured as a first series of the firstconductive lines.

Referring to FIGS. 2 and 2A, semiconductor material 24 is formed overthe first series of the first conductive lines 12. The semiconductormaterial 24 may comprise any suitable composition(s); and in someembodiments may comprise, consist essentially of, or consist of one ormore of silicon, germanium, III/V semiconductor material (e.g., galliumphosphide), semiconductor oxide (e.g., InGaZnO, where the chemicalformula indicates primary constituents rather than a specificstoichiometry), etc.; with the term III/V semiconductor materialreferring to semiconductor materials comprising elements selected fromgroups III and V of the periodic table (with groups III and V being oldnomenclature, and now being referred to as groups 13 and 15). In someexample embodiments, the semiconductor material 24 may comprise, consistessentially of, or consist of silicon. The silicon may be in anysuitable crystalline form (e.g., monocrystalline, amorphous,polycrystalline, etc.).

The semiconductor material 24 may include regions 15, 17 and 19. Theregions 17 and 19 may be conductively doped to eventually becomesource/drain regions of access devices (transistors), and the region 15may be appropriately doped to become channel regions of the accessdevices. Dashed lines are provided to illustrate approximate boundariesbetween the regions 15, 17 and 19.

Referring to FIGS. 3 and 3A, the semiconductor material 24 is patternedinto a configuration which includes upwardly-projecting structures(features) 26 and 28. The upwardly-projecting structures 26 and 28 maybe alternatively referred to as pillars, posts, etc.

The upwardly-projecting structures 26 may be referred to as firstupwardly-projecting structures, and together form a set 30. Theupwardly-projecting structures 28 may be referred to as secondupwardly-projecting structures. The upwardly-projecting structures 26and 28 are aligned with the conductive lines 12. One of such conductivelines 12 is shown in the cross-section of FIG. 3A, and theupwardly-projecting structures 26 and 28 directly over such conductiveline are also shown in FIG. 3A.

The first upwardly-projecting structures 26 are spaced from one anotherby first gaps 32. The upwardly-projecting features 26 may be on a pitchP which is within a range of from about 30 nanometers (nm) to about 60nm. In some embodiments, the upper surfaces of the structures 26 mayhave widths W₁ along the cross-section of FIG. 3A which are within arange of from about 15 nm to about 30 nm, and upper regions of the gaps32 may have widths W2 which are within a range of from about 15 nm toabout 30 nm.

The second upwardly-projecting structure 28 along the cross-section ofFIG. 3A is spaced from the set 30 of the first upwardly-projectingstructures 26 by a second gap 34. The second gap 34 has a width W3 alongthe cross-section of FIG. 3A. The width W3 of the second gap is largerthan the widths W2 of the first gaps, and in some embodiments may be atleast about twice as large as the widths of the first gaps, at leastabout three times as large as the widths of the first gaps, at leastabout four times as large as the widths of the first gaps, etc.

In the shown embodiment of FIG. 3A, one of the first upwardly-projectingstructures 26 is adjacent to the second gap 34. Such upwardly-projectingstructure may be referred to as an edge upwardly-projecting structure ofthe set 30, and is labeled as 26 a so that it may be distinguished fromthe other upwardly-projecting structures 26.

The structures 26 have sidewall surfaces 27 and top surfaces 25, and thestructures 28 have sidewall surfaces 31 and top surfaces 29. In theillustrated embodiment, the sidewall surfaces (sidewalls) 27 and 31 aretapered along the vertical (z-axis) direction. In other embodiments, thesidewalls may be vertically straight rather than being tapered.

In the shown embodiment, the semiconductor material 24 remains over theconductive line 12 within the gaps 32 and 34. In other embodiments, thesemiconductor material 24 may be entirely removed from within the widegap 34 and/or from within the narrow gaps 32.

Referring to FIGS. 4 and 4A, insulative material 36 is provided alongthe bottoms of the gaps 32 and 34. The insulative material 36 may beprovided to any suitable thickness. The insulative material 36 offsetsbottoms of transistor gates (formed at a later process stage) relativeto bottoms of the upwardly-projecting structures 26 and 28, and in someembodiments may be formed to a thickness approximately equal to thethickness of the lower source/drain regions 19 (as shown). Theinsulative material 36 may comprise any suitable composition(s); and insome example embodiments may comprise, consist essentially of, orconsist of silicon dioxide.

Dielectric material 38 is formed along the surfaces 25, 27, 29 and 31 ofthe upwardly-projecting structures 26 and 28. The dielectric material 38may be formed subsequent to the formation of the insulative material 36(as shown) so that the dielectric material 38 is not along lowerportions of the upwardly-projecting structures 26 and 28. Alternatively,the dielectric material 38 may be formed prior to formation of theinsulative material 36, and may extend along lower portions of thestructures 26 and 28.

The dielectric material 38 may comprise any suitable composition(s). Insome embodiments, the dielectric material 38 may be formed by oxidizingthe semiconductor material 24. Accordingly, if the semiconductormaterial 24 comprises, consists essentially of, or consists of silicon,then the dielectric material 38 may comprise, consist essentially of, orconsist of silicon dioxide. Alternatively, at least some of thedielectric material 38 may be formed by deposition (e.g., atomic layerdeposition, chemical vapor deposition, etc.). In such embodiments, thedielectric material 38 may comprise, for example, one or more ofaluminum oxide, hafnium oxide, zirconium oxide, etc., either in additionto, or alternatively to, silicon dioxide.

The dielectric material 38 may be formed to any suitable thickness, andin some embodiments may be formed to a thickness within a range of fromabout 15 angstroms (Å) to about 50 Å.

Conductive material 40 is formed over the dielectric material 38; and inthe shown embodiment is formed over the first and secondupwardly-projecting structures 26 and 28, and within the first andsecond gaps 32 and 34. The conductive material 40 may comprise anysuitable electrically conductive composition(s); such as, for example,one or more of various metals (e.g., titanium, tungsten, cobalt, nickel,platinum, ruthenium, etc.), metal-containing compositions (e.g., metalsilicide, metal nitride, metal carbide, etc.), and/or conductively-dopedsemiconductor materials (e.g., conductively-doped silicon,conductively-doped germanium, etc.). In some embodiments, the conductivematerial 40 may comprise, consist essentially of, or consist of one ormore metals (e.g., titanium, tungsten, etc.) and/or metal-containingcompositions (e.g., titanium silicide, titanium carbide, titaniumnitride, titanium boride, tungsten silicide, tungsten carbide, tungstennitride, tungsten boride, etc.).

The conductive material 40 be formed to any suitable thickness, and insome embodiments may be formed to a thickness within a range of fromabout 20 Å to about 100 Å.

Referring to FIGS. 5 and 5A, protective material 42 is formed across thefirst gaps 32 and within the second gap 34. Notably, the protectivematerial 42 does not fill the first gaps 32, but instead pinches offacross the first gaps to leave voids 44 within the first gaps 32. Theprotective material 42 does, however, extend into the second gap 34, andin the shown embodiment extends conformally along the conductivematerial 40 within the second gap 34.

The protective material 42 may be formed to any suitable thickness toestablish the illustrated configuration in which the material pinchesoff across the narrow gaps 32, while extending conformally (or at leastsubstantially conformally) along the conductive material 40 within thesecond gap 34. The term “at least substantially conformally” meansconformally to within reasonable tolerances of fabrication andmeasurement. In some embodiments, the protective material 42 may beformed to a thickness within a range of from about 50 nm to about 100nm.

The protective material 42 may comprise any suitable composition(s). Insome embodiments, the protective material 42 may comprise, consistessentially of, or consist of one or more of silicon dioxide and/orvarious high-k compositions. The term high-k means a dielectric constantgreater than that of silicon dioxide (i.e., greater than about 3.9).Example high-k compositions include silicon nitride, aluminum oxide,hafnium oxide, zirconium oxide, etc. The protective material 42 may beelectrically insulative in some embodiments. Alternatively, theprotective material 42 may be conductive or semiconductive.

Referring to FIGS. 6 and 6A, the protective material 42 is removed fromover the first and second upwardly-projecting structures 26 and 28 whileleaving segments 46 of the protective material over the conductivematerial 40 within the wide gap (second gap) 34. The segments 46 may beconsidered to include a first segment 46 a adjacent a sidewall (orsidewall surface) 27 of the edge upwardly-projecting structure 26 a, anda second segment 46 b adjacent a sidewall (or sidewall surface) 31 ofthe second upwardly-projecting structure 28.

Referring to FIGS. 7 and 7A, one or more suitable etches are utilized topattern the conductive material 40 into first conductive structures 48within the first gaps 32, and into second conductive structures 50within the second gap 34. The segments 46 a and 46 b of the protectivematerial 42 are utilized to protect regions of the conductive material40 within the second gap 34 so that such regions are not lost during theetching of the conductive material 40. In contrast, conventionalprocessing lacking the protective material 42 may lose the entirety, ornearly the entirety, of the conductive material 40 from within thesecond gap 34 which problematically loses, or substantially entirelyloses, conductive structures analogous to the illustrated conductivestructures 50. Accordingly, the protective material 42 mayadvantageously enable the conductive structures 50 to be formed to asuitable size and configuration for maintaining integrity of devicesfabricated within the tier 20 of the integrated assembly 10.

In the shown embodiment, the conductive structures 48 and 50 areincorporated into wordlines 52 (WL1-WL5), with the wide gap 34 beingbetween the wordlines WL4 and WL5. The pillars (upwardly-extendingstructures) 26 and 28 are incorporated into active regions of accessdevices (transistors) 54. Each of the transistors includes a channelregion 15 vertically disposed between a lower source/drain region 19 andan upper source/drain region 17. The source/drain regions 17 and 19 aregatedly coupled to one another through the channel region 28.Specifically, an appropriate voltage (i.e., a voltage above a thresholdvoltage) on a wordline 52 may induce electrical fields on the channelregions proximate such wordline to cause electrical coupling between thesource/drain regions on opposing sides of the channel regions.

The second conductive structures 50 are shaped differently than thefirst conductive structures 48 along the cross-section of FIG. 7A.Specifically, the first conductive structures 48 are shown to besubstantially straight structures (with the term “substantiallystraight” meaning straight to within reasonable tolerances offabrication and measurement), and the conductive structures 50 are shownto be angle plates. The conductive structure 50 adjacent the sidewall 27of the edge pillar 26 a is labeled as 50 a, and the conductive structure50 adjacent the sidewall 31 of the pillar 28 is labeled as 50 b. Theconductive structures 50 a and 50 b may be referred to as first andsecond angle plates, respectively.

Each of the angle plates 50 a and 50 b includes a primary portion 56,and a secondary portion 58 extending into the gap 34 from the primaryportion 56. In some embodiments, secondary portions 58 may be consideredto be configured as ledges. The ledge 58 of the conductive structure 50a may be referred to as a first ledge, and the ledge 58 of the secondconductive structure 50 b may be referred to as a second ledge. Theremaining portions of the protective material 42 are supported by theledges 58. During the etching of the conductive material 40, theprotective material 42 protects the ledges 58 and thus defines thelengths of the ledges. In some embodiments the protective material 42may be thinned during the etching utilized to pattern the conductivematerial 40 which may reduce the lengths of the ledges 58 as compared toillustrated embodiment in which the protective material 42 is notthinned.

In the shown embodiment, a height of the conductive material 40 isreduced relative to a height of the protective material 42 during thepatterning of the conductive material 40. Accordingly, the angle plates50 a and 50 b have upper surfaces 51 which are vertically offsetrelative to upper surfaces 53 of the segments 46 a and 46 b of theprotective material 42.

The first and second angle plates 50 a and 50 b may be substantiallymirror images of one another across a vertical plane 60 centrallylocated between the first and second angle plates, as shown. In otherembodiments (not shown), the first and second angle plates may not besubstantially mirror images of one another. The term “substantial mirrorimage” means a mirror image to within reasonable tolerances offabrication and measurement.

Referring to FIGS. 8-8B, storage elements 62 are formed over the pillars26 and 28, and are electrically coupled with the upper source/drainregions 17. The storage-elements 62 may be any suitable devices havingat least two detectable states; and in some embodiments may be, forexample, capacitors, resistive-memory devices, conductive-bridgingdevices, phase-change-memory (PCM) devices, programmable metallizationcells (PMCs), etc. If the storage elements are capacitors, they may beeither ferroelectric capacitors (i.e., may comprise ferroelectricinsulative material between a pair of capacitor electrodes) or may benon-ferroelectric capacitors (i.e., may comprise only non-ferroelectricinsulative material between a pair of capacitor electrodes). Exampleferroelectric insulative materials may include one or more of transitionmetal oxide, zirconium, zirconium oxide, niobium, niobium oxide,hafnium, hafnium oxide, lead zirconium titanate, and barium strontiumtitanate. Example non-ferroelectric insulative materials may comprise,consist essentially of, or consist of silicon dioxide.

In some embodiments, the storage elements 62 over the pillars 26 may bereferred to as first storage elements, and the storage elements 62 overthe pillars 28 may be referred to as second storage elements.

Insulative material 64 is formed within the gaps 32 and 34 (FIGS. 7 and7A). In some embodiments, the protective material 42 may be consideredto correspond to a first insulative material, and the insulativematerial 64 may be considered to correspond to a second insulativematerial. The first insulative material 42 is not within the first gaps32, and the second insulative material 64 is within both the first gaps32 and the second gap 34 (with the gaps 32 and 34 being shown in FIGS. 7and 7A). The first and second insulative materials 42 and 64 maycomprise different compositions relative to one another. For instance,the first insulative material 42 may comprise one or more high-kdielectric compositions, while the second insulative material 64 maycomprise, consist essentially of, or consist of silicon dioxide. Inother embodiments, the materials 42 and 64 may be compositionally thesame as one another, and may merge together at the processing stage ofFIGS. 8-8B. Additionally, the material 36 may be compositionally thesame as one or both of the materials 42 and 64, or may becompositionally different from both of the materials 42 and 64.

Although the protective material 42 is shown remaining in the finalstructure of FIGS. 8-8B, it is to be understood that in otherembodiments the protective material 42 may be removed after thepatterning of the conductive structures 50 a and 50 b.

The storage elements 62 and access devices (transistors) 54 may beincorporated into a memory array 66. Accordingly, the tier 20 may bereferred to as a memory tier.

In the illustrated embodiment, a conductive interconnect 68 is formed toextend through the memory tier 20 and to circuitry 70 associated withthe base 22. The circuitry 70 may be logic circuitry (e.g., CMOS) insome applications.

The conductive interconnect 68 is formed within the wide gap 34 (labeledin FIGS. 7 and 7A). The wide gap may simplify formation of theinterconnect 68 as compared to forming an analogous interconnect withina narrower gap. The interconnect 68 may have any suitable shape, and mayor may not correspond to the illustrated cylindrical pillar. Theinterconnect 68 may comprise any suitable conductive material 72. Forinstance, the conductive material 72 may comprise one or more of variousmetals (e.g., titanium, tungsten, cobalt, nickel, platinum, ruthenium,etc.), metal-containing compositions (e.g., metal silicide, metalnitride, metal carbide, etc.), and/or conductively-doped semiconductormaterials (e.g., conductively-doped silicon, conductively-dopedgermanium, etc.).

The conductive interconnect 68 may be located between the first andsecond angle plates 50 a and 50 b as can be understood by comparing thetop view of FIG. 8 (in which the interconnect 68 is shown, but in whichthe angle plates 50 a and 50 b are not visible) with the top view ofFIG. 7 (which shows the angle plates 50 a and 50 b).

The memory array 66 may have any suitable configuration. FIG. 9 shows anexample configuration in which the storage elements 62 are capacitors.The capacitors may be non-ferroelectric capacitors, and accordingly thememory array 66 may be a dynamic random access memory (DRAM) array.Alternatively, the capacitors may be ferroelectric capacitors, andaccordingly the memory array 66 may be a ferroelectric random accessmemory (FeRAM) array.

The illustrated capacitors 62 each have an electrical node coupled withan access transistor 54, and each have another electrical node coupledwith a reference 76. The reference 76 may correspond to any suitablereference voltage, including, ground, VCC/2, etc.

The wordlines 52 are shown coupled with wordline-driver-circuitry 78,and the digit lines 12 are shown coupled with sense-amplifier-circuitry80. The access transistors 54 and storage elements 62 together formmemory cells 82, with each of the memory cells being uniquely addressedby one of the digit lines 12 in combination with one of the wordlines52.

The assemblies and structures discussed above may be utilized withinintegrated circuits (with the term “integrated circuit” meaning anelectronic circuit supported by a semiconductor substrate); and may beincorporated into electronic systems. Such electronic systems may beused in, for example, memory modules, device drivers, power modules,communication modems, processor modules, and application-specificmodules, and may include multilayer, multichip modules. The electronicsystems may be any of a broad range of systems, such as, for example,cameras, wireless devices, displays, chip sets, set top boxes, games,lighting, vehicles, clocks, televisions, cell phones, personalcomputers, automobiles, industrial control systems, aircraft, etc.

Unless specified otherwise, the various materials, substances,compositions, etc. described herein may be formed with any suitablemethodologies, either now known or yet to be developed, including, forexample, atomic layer deposition (ALD), chemical vapor deposition (CVD),physical vapor deposition (PVD), etc.

The terms “dielectric” and “insulative” may be utilized to describematerials having insulative electrical properties. The terms areconsidered synonymous in this disclosure. The utilization of the term“dielectric” in some instances, and the term “insulative” (or“electrically insulative”) in other instances, may be to providelanguage variation within this disclosure to simplify antecedent basiswithin the claims that follow, and is not utilized to indicate anysignificant chemical or electrical differences.

The terms “electrically connected” and “electrically coupled” may bothbe utilized in this disclosure. The terms are considered synonymous. Theutilization of one term in some instances and the other in otherinstances may be to provide language variation within this disclosure tosimplify antecedent basis within the claims that follow.

The particular orientation of the various embodiments in the drawings isfor illustrative purposes only, and the embodiments may be rotatedrelative to the shown orientations in some applications. Thedescriptions provided herein, and the claims that follow, pertain to anystructures that have the described relationships between variousfeatures, regardless of whether the structures are in the particularorientation of the drawings, or are rotated relative to suchorientation.

The cross-sectional views of the accompanying illustrations only showfeatures within the planes of the cross-sections, and do not showmaterials behind the planes of the cross-sections, unless indicatedotherwise, in order to simplify the drawings.

When a structure is referred to above as being “on”, “adjacent” or“against” another structure, it can be directly on the other structureor intervening structures may also be present. In contrast, when astructure is referred to as being “directly on”, “directly adjacent” or“directly against” another structure, there are no interveningstructures present. The terms “directly under”, “directly over”, etc.,do not indicate direct physical contact (unless expressly statedotherwise), but instead indicate upright alignment.

Structures (e.g., layers, materials, etc.) may be referred to as“extending vertically” to indicate that the structures generally extendupwardly from an underlying base (e.g., substrate). Thevertically-extending structures may extend substantially orthogonallyrelative to an upper surface of the base, or not.

Some embodiments include an integrated assembly having a set of firstupwardly-projecting structures spaced from one another by first gaps.One of the first upwardly-projecting structures is an edgeupwardly-projecting structure of the set. A second upwardly-projectingstructure is spaced from the set of the first upwardly-projectingstructures by a second gap which is larger than the first gaps. Firstconductive structures are within the first gaps and adjacent sidewallsof the first projecting structures. Second conductive structures arewithin the second gap. One of the second conductive structures isadjacent a sidewall of the edge upwardly-projecting structure andanother of the second conductive structures is adjacent a sidewall ofthe second upwardly-projecting structure. The second conductivestructures are shaped differently than the first conductive structuresalong the cross-section.

Some embodiments include a method of forming an integrated assembly.Semiconductor material is patterned into a configuration which includes,along a cross-section, a set of first upwardly-projecting structuresspaced from one another by first gaps and a second upwardly-projectingstructure spaced from the set by a second gap. One of the firstupwardly-projecting structures is an edge upwardly-projecting structureof the set and is adjacent the second gap. The second gap is larger thanthe first gaps. Conductive material is formed along the first and secondupwardly-projecting structures and within the first and second gaps.Protective material is formed across the first gaps and within thesecond gap. The protective material is removed from over the first andsecond upwardly-projecting structures while leaving segments of theprotective material over the conductive material within the second gap.One of the segments of the protective material is a first segment and isadjacent a sidewall of the edge upwardly-projecting structure, and oneof the segments of the protective material is a second segment and isadjacent a sidewall of the second upwardly-projecting structure. An etchis utilized to pattern the conductive material into first conductivestructures within the first gaps and into second conductive structureswithin the second gap. One of the second conductive structures isadjacent the sidewall of the edge upwardly-projecting structure and isprotected by the first segment of the protective material during theetch. Another of the second conductive structures is adjacent thesidewall of the second upwardly-projecting structure and is protected bythe second segment of the protective material during the etch.

Some embodiments include a method of forming an integrated assembly. Asemiconductor material is formed over a first series of first conductivelines. The semiconductor material is patterned into a configurationwhich includes, along a cross-section, a set of firstupwardly-projecting structures over one of the first conductive linesand spaced from one another by first gaps and a secondupwardly-projecting structure over said one of the first conductivelines and spaced from the set by a second gap. One of the firstupwardly-projecting structures is an edge upwardly-projecting structureof the set and is adjacent the second gap. The second gap is larger thanthe first gaps. Conductive material is formed along the first and secondupwardly-projecting structures and within the first and second gaps.Protective material is formed across the first gaps and within thesecond gap. The protective material is removed from over the first andsecond upwardly-projecting structures while leaving segments of theprotective material over the conductive material within the second gap.One of the segments of the protective material is a first segment and isadjacent a sidewall of the edge upwardly-projecting structure, and oneof the segments of the protective material is a second segment and isadjacent a sidewall of the second upwardly-projecting structure. An etchis utilized to pattern the conductive material into a second series ofsecond conductive lines. The second series includes a first set of thesecond conductive lines within the first gaps, and a second set of thesecond conductive lines within the second gap. One of the secondconductive lines of the second set is adjacent the sidewall of the edgeupwardly-projecting structure and is protected by the first segment ofthe protective material during the etch. Another of the secondconductive lines of the second set is adjacent the sidewall of thesecond upwardly-projecting structure and is protected by the secondsegment of the protective material during the etch. Storage elements areformed over the first upwardly-projecting structures and over the secondupwardly-projecting structure. Each of the storage elements is uniquelyaddressed by said one of the first conductive lines and by a pair of thesecond conductive lines.

In compliance with the statute, the subject matter disclosed herein hasbeen described in language more or less specific as to structural andmethodical features. It is to be understood, however, that the claimsare not limited to the specific features shown and described, since themeans herein disclosed comprise example embodiments. The claims are thusto be afforded full scope as literally worded, and to be appropriatelyinterpreted in accordance with the doctrine of equivalents.

1. An integrated assembly, comprising, along a cross-section: a set offirst upwardly-projecting structures spaced from one another by firstgaps; one of the first upwardly-projecting structures being an edgeupwardly-projecting structure of the set; a second upwardly-projectingstructure spaced from the set of the first upwardly-projectingstructures by a second gap which is larger than the first gaps; firstconductive structures within the first gaps and adjacent sidewalls ofthe first projecting structures; second conductive structures within thesecond gap; the second conductive structures being separate and discretestructures from the first conductive structures; one of the secondconductive structures being adjacent a sidewall of the edgeupwardly-projecting structure and another of the second conductivestructures being adjacent a sidewall of the second upwardly-projectingstructure; and the second conductive structures being shaped differentlythan the first conductive structures along the cross-section.
 2. Theintegrated assembly of claim 1 comprising an electrically conductiveinterconnect extending through a bottom of the second gap.
 3. Theintegrated assembly of claim 1 wherein the first conductive structuresare substantially straight structures along the cross-section, andwherein the second conductive structures are angle plates along thecross-section.
 4. The integrated assembly of claim 3 wherein said one ofsecond conductive structures is a first of the angle plates and saidother of the second conductive structures is a second of the angleplates; and wherein the first and second angle plates are substantiallymirror images of one another across a vertical plane centrally locatedbetween the first and second angle plates.
 5. The integrated assembly ofclaim 3 wherein: said one of second conductive structures is a first ofthe angle plates and said other of the second conductive structures is asecond of the angle plates; the first angle plate includes a firstprimary portion along the sidewall of the edge upwardly-projectingstructure and includes a first secondary portion extending into thesecond gap from the first primary portion; the first secondary portionbeing configured as a first ledge adjacent the sidewall of the edgeupwardly-projecting structure; and the second angle plate includes asecond primary portion along the sidewall of the secondupwardly-projecting structure and includes a second secondary portionextending into the second gap from the second primary portion; thesecond secondary portion being configured as a second ledge adjacent thesidewall of the second upwardly-projecting structure.
 6. The integratedassembly of claim 5 comprising: first insulative material supported bythe first and second ledges and extending along the first and secondprimary portions; second insulative material within the first and secondgaps; the second insulative material being over the first and secondangle plates, and being over the first insulative material; and thefirst insulative material being compositionally different from thesecond insulative material.
 7. The integrated assembly of claim 6wherein the first insulative material is not over the first conductivestructures within the first gaps.
 8. The integrated assembly of claim 6wherein the first and second angle plates have upper surfaces verticallyoffset relative to upper surfaces of the first insulative materialsupported by the first and second ledges, respectively.
 9. Theintegrated assembly of claim 6 wherein the first insulative materialcomprises one or more high-k dielectric compositions, and wherein thesecond insulative material comprises silicon dioxide.
 10. The integratedassembly of claim 1 wherein the second gap is at least about twice asbig as the first gaps.
 11. The integrated assembly of claim 1 whereinthe second gap is at least about three-times as big as the first gaps.12. The integrated assembly of claim 1 wherein the second gap is atleast about four-times as big as the first gaps.
 13. The integratedassembly of claim 1 wherein the first and second conductive structuresare wordlines and are coupled with wordline-driver-circuitry.
 14. Theintegrated assembly of claim 13 wherein the first and secondupwardly-projecting structures are pillars of semiconductor material,and are over a digit line; and wherein the digit line is coupled withsense-amplifier-circuitry.
 15. The integrated assembly of claim 14wherein: the first upwardly-projecting structures are first pillars ofthe semiconductor material; storage elements are over the first pillarsof the semiconductor material and are part of a memory array; and eachof the first storage elements is uniquely addressed with the digit linein combination with one of the wordlines.
 16. The integrated assembly ofclaim 15 wherein the storage elements are capacitors and the memoryarray is a DRAM array.
 17. The integrated assembly of claim 15 whereinthe storage elements are ferroelectric capacitors and the memory arrayis a FeRAM array.
 18. The integrated assembly of claim 15 wherein thestorage elements are first storage elements, and wherein a secondstorage element is over the second upwardly-extending structure and iselectrically coupled with the second upwardly-extending structure.19-32. (canceled)
 33. An integrated assembly, comprising, along across-section: a set of first upwardly-projecting structures spaced fromone another by first gaps; one of the first upwardly-projectingstructures being an edge upwardly-projecting structure of the set; asecond upwardly-projecting structure spaced from the set of the firstupwardly-projecting structures by a second gap which is larger than thefirst gaps; first conductive structures within the first gaps andadjacent sidewalls of the first projecting structures; second conductivestructures within the second gap; one of the second conductivestructures being adjacent a sidewall of the edge upwardly-projectingstructure and another of the second conductive structures being adjacenta sidewall of the second upwardly-projecting structure; the secondconductive structures being shaped differently than the first conductivestructures along the cross-section; wherein the first conductivestructures are substantially straight structures along thecross-section, and wherein the second conductive structures are angleplates along the cross-section; where said one of second conductivestructures is a first of the angle plates and said other of the secondconductive structures is a second of the angle plates; wherein the firstangle plate includes a first primary portion along the sidewall of theedge upwardly-projecting structure and includes a first secondaryportion extending into the second gap from the first primary portion;the first secondary portion being configured as a first ledge adjacentthe sidewall of the edge upwardly-projecting structure; wherein thesecond angle plate includes a second primary portion along the sidewallof the second upwardly-projecting structure and includes a secondsecondary portion extending into the second gap from the second primaryportion; the second secondary portion being configured as a second ledgeadjacent the sidewall of the second upwardly-projecting structure; andfirst insulative material supported by the first and second ledges andextending along the first and second primary portions; second insulativematerial within the first and second gaps; the second insulativematerial being over the first and second angle plates, and being overthe first insulative material; and the first insulative material beingcompositionally different from the second insulative material.
 34. Theintegrated assembly of claim 33 wherein the first insulative material isnot over the first conductive structures within the first gaps.
 35. Theintegrated assembly of claim 33 wherein the first and second angleplates have upper surfaces vertically offset relative to upper surfacesof the first insulative material supported by the first and secondledges, respectively.
 36. The integrated assembly of claim 33 whereinthe first insulative material comprises one or more high-k dielectriccompositions, and wherein the second insulative material comprisessilicon dioxide.
 37. An integrated assembly, comprising, along across-section: a set of first upwardly-projecting structures spaced fromone another by first gaps; one of the first upwardly-projectingstructures being an edge upwardly-projecting structure of the set; asecond upwardly-projecting structure spaced from the set of the firstupwardly-projecting structures by a second gap which is larger than thefirst gaps; first conductive structures within the first gaps andadjacent sidewalls of the first projecting structures; second conductivestructures within the second gap; one of the second conductivestructures being adjacent a sidewall of the edge upwardly-projectingstructure and another of the second conductive structures being adjacenta sidewall of the second upwardly-projecting structure; the secondconductive structures being shaped differently than the first conductivestructures along the cross-section; and wherein the first and secondconductive structures are wordlines and are coupled withwordline-driver-circuitry.
 38. The integrated assembly of claim 37wherein the first and second upwardly-projecting structures are pillarsof semiconductor material, and are over a digit line; and wherein thedigit line is coupled with sense-amplifier-circuitry.
 39. The integratedassembly of claim 38 wherein: the first upwardly-projecting structuresare first pillars of the semiconductor material; storage elements areover the first pillars of the semiconductor material and are part of amemory array; and each of the first storage elements is uniquelyaddressed with the digit line in combination with one of the wordlines.40. The integrated assembly of claim 1 wherein at least one of the firstupwardly-projecting structures comprises a channel region.
 41. Theintegrated assembly of claim 1 wherein at least one of the firstupwardly-projecting structures comprises a source/drain region.
 42. Theintegrated assembly of claim 1 wherein at least one of the firstconductive structures comprises a wordline.
 43. The integrated assemblyof claim 1 wherein at least one of the second conductive structurescomprises a wordline.